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MicroTool HQ:  824 South Tejon St.; Colorado Springs, CO 80903; USA; 719-471-9888; microtool@brooks.com




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300mm solutions

300mm to 300, 200, 150mm Bridge Tools

300mm Load Port Alignment

Robotic Alignment

Precision Levels

Dummy Wafers

Reticle Solutions

Manual Openers

Cassette Interfaces

Cassette Checkers

300mm Film Frame Shipper


The Next Generation is Here...


Next Generation Electronic Level Wafer

         Soon to be the most used item in your toolkit! Keep all of your equipment “on-the-level” with Brooks-PRI‘s electronic level wafer.  Designed to match the weight of a silicon wafer, this versatile tool can be used on end effectors and blades, or in wafer cassettes or quartz boats. The simple-to-use display allows you to level to earth or to your own user-defined reference plane.  Intuitive graphics and touch screens simplify operation, while the remote real-time display is convenient for remote adjustments. 

New Features:

>          New high resolution, high accuracy electronic level 

>        New low profile – fits through more slit valves. 

>        Fast settling time 

>        Improved software with user setup capabilities. 

>        2-Axis electronic level for leveling to ground or to a learned reference.

>        Adjustments can be made conveniently using the remote real-time display.

>        Carbon fiber wafer mimics the geometry and weight of a silicon wafer.

>        Numerical readout for both pitch and roll allows for statistical analysis and calibration to specification.

>        Intuitive graphics screens and touch screen LCD simplify operation.

Questions about this product?

Download the product specs sheet here



EL Latch Key

Electronic Latch Key Level

Next Generation 
Spot Level


High Resolution Spot Level

BL Series

Bubble Level Series