MicroTool is committed to supporting the drive to 300mm production. From simple and intuitive tools for interface, to high-precision robotic alignment systems, MicroTool 300mm solutions bring productivity and effectiveness to wafer handling.


RC 3003

AM 3000

AM 3004

 AM 3003 LP-3004

300 mm robotic alignment tool 200 mm wafer adapter for 300 mm FOUPS 200 mm cassette adapter for 300 mm FOUPS 11 mm lift adapter for 300 mm FOUPs Load Port Tool

MPO 3002

Next Generation 
EL Series		 Next Generation 
Spot Level		 BL Series KP 3000



300 mm FOUP opener High Resolution EL Series High Resolution Spot Level Bubble Level Series 300 mm Kinematic
 Coupler Pins

TW Series		 FFS Series CF Series
100 mm to 300 mm Glass Target Wafers 300 mm Film Frame Shipper Series Carbon Fiber Dummy Wafers